西南石油大学学报(自然科学版) ›› 2007, Vol. 29 ›› Issue (4): 145-148.DOI: 10.3863/j.issn.1000-2634.2007.04.37

• 石油机械工程及其它 • 上一篇    下一篇

石油机械大尺寸零件精密测量装置研究

周秀云1,2 周肇飞1 张涛1   

  1. 1.四川大学激光应用研究所,四川 成都 610065;2.电子科技大学自动化工程学院
  • 收稿日期:2006-11-24 修回日期:1900-01-01 出版日期:2007-08-20 发布日期:2007-08-20
  • 通讯作者: 周秀云

LARGE SIZE PRECISSION MEASURMENT DEVICE FOR PETROLEUM MACHINE

ZHOU Xiu-yun1,2 ZHOU Zhao-fei1 ZHANG Tao1   

  1. Institute of Applied Laser,Sichuan University,Chengdu Sichuan 610065,China
  • Received:2006-11-24 Revised:1900-01-01 Online:2007-08-20 Published:2007-08-20
  • Contact: ZHOU Xiu-yun

摘要:

研究了一种可用于工业现场进行大尺寸零件精密测量的装置。该装置以有高稳定性和强抗干扰能力(室外时频率稳定性可达10-7)的双纵模热稳频He—Ne 激光器为光源,其拍频频率约为790MHz ,拍频波长λ约380mm,拍频波长为测量基准;以拍频波节点为对准标志, 最邻近节点到被测点的尾数间距x1,x2用组合于同一光路中的分系统激光干涉仪测量,分辨率为0.08μm的方法来进行大尺寸L的测量 。测试表明,此装置具有很好的环境适应性和同类仪器中最高的频差稳定度。整个测量系统可在0~20m 范围内工作,测量不确定度优于±30μm/ 10m 。对石油机械大尺寸零件测量的环境性和高精度性研究具有重要意义。

关键词: 大尺寸测量, 双纵模激光, 拍频频差, 高精度, 不确定度, 石油机械

Abstract: A largesize device precissily measuring spares and being able to be applied on site t is studied in the paper.The frequencystabilized HeNe laser with thermoregulation is used as the light source, which operates on the double longitudinal modes and has high frequency stability and good antidisturbance performance, the frequency stability is better than 10-7 (in open air) . It has the beat frequency about 790MHz and beat frequency wavelength λ=380μm which is benchmark of measurement. The node of the beatwave is used as sampling flag and the distance between the node and the close measuring point is measured with double frequency interferometer, the large size L is measured with the resolution of 0.08μm. The test indicates that the device has a high environment adaptability and highest frequency difference stability among the same kind of existing great size device.The measuring accuracy is better than ±30μm/10m and the measuring range is 0~20m. This results is important to resolve the ambivalent promble between environment and measure precision of large size in petroleum machine.

Key words: large size measurement, double longitudinal mode laser, beat frequency difference, high precision, petroleum machine

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